| 摘要 |
PURPOSE:To economize the energy of a vapor deposition source by converting the heat energy released from a high-temp. crucible, heater, etc. of the vapor deposition device to electric energy by a thermoelectrical conversion element, etc. and recovering said energy. CONSTITUTION:A vapor deposition material 6 in the crucible 2 is heated and evaporated by the heater 3 and is deposited by evaporation on the surface of a substrate 5 in a vacuum vessel 1 of the vapor deposition device. The termoelectrical conversion element 7 made of iron disilicate (FeSi2). etc. is disposed to the crucible 2 and the outside circumference of the heater 3 thereof to convert the heat energy released wastefuly except the energy to be used for heating and evaporating of the material 6 to electrical energy. The electrical energy is converted to a voltage by a voltage converter 8. The voltage is inputted to a power source 4 for the heater 3 to improve the thermal efficiency over the entire part of the device. The energy of the vapor deposition device is thus economized. |
