| 摘要 |
PURPOSE:To contrive to economize the electric power of the reserve discharging power and to improve the stability of discharge, by a method wherein the voltage of which direct current component is negative is applied between a dielectric electrode and a cathode making the cathode as a reference. CONSTITUTION:A laser resonator is composed of two reflecting mirror 2 disposed at the both end of an anode 1 and a cathode 7. An alternate current power source 11 for generating silent discharge between the inner part of the anode 1 and a dielectric material 9 and a main discharging power source 12 for producing the glow discharge are provided between the anode 1 and the cathode 7. A direct current power source 13 is provided to give minus bias making the cathode 7 as standard. Silent discharge current flows between a dielectric material electrode 10 and the cathode 7, and electrons flow to the direction of the cathode 7, and electrons are emitted effectively through small holes 8. Hereby, only electrons are supplied to the cathode, and the electrical power for reserve ionization are used effectively. |
