| 摘要 |
<p>PURPOSE:To eliminate adhesion to a sheet, to brake a wafer without attachment of the sheet to the rollers without excessive force, and to reduce the occurrence of breakdown and flaws at the time of braking as a result, by providing an irregular pattern on the compressing surface of a roller. CONSTITUTION:After dicing of an element, many grooves 8, 8... are provided in a compressing surface 5a of a braking roller 5, which compresses a wafer 2. An inrregular pattern is formed on the surface of the roller. When this roller is used, the compressing force to the sheet is obtained by the convex parts. Air is present in a part between the concave parts and the sheet. Therefore, the sheet is not sucked by the roller surface. Thus the occurrence of the breakdown and flaws due to the adhesion of the braking roller and the sheet can be eliminated.</p> |
