| 摘要 |
Thermally induced stress between a quartz proof mass and the metal stators which constrain it are relieved by a suspension system employing pliant members. Contact points between the proof mass and the stators are formed by raised pads on the proof mass which contact beams formed in the stators. Each beam has an axis of pliancy, which axis extends through a fixed, stable contact point between the proof mass and the stators, the beam being otherwise rigid to applied forces along axes orthogonal to the axis of pliancy. The resulting suspension system exhibits compliance to thermally induced loads while providing rigidity in response to seismic loads. In alternative embodiments of the suspension system, the pliant beams are positioned to provide temperature compensation for compounds of the transducer. |
