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发明名称
BONDING TOOL
摘要
申请公布号
JPS614235(A)
申请公布日期
1986.01.10
申请号
JP19840125948
申请日期
1984.06.19
申请人
MATSUSHITA DENKI SANGYO KK
发明人
NODA HISATO;KABESHITA AKIRA
分类号
H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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