Thickness measuring instrument with a stationary specimen observing mirror

摘要

An instrument for measuring a property by means of X-ray fluorescence analysis is described. The instrument comprises a device for emitting X-ray beams onto a specimen, a device for detecting and analyzing the fluorescence of the specimen which has been irradiated by the X-ray beams in order to determine a property of the specimen, for example the coating thickness, a collimating device for the X-ray beams for producing a narrow beam directed onto the specimen, a movable diaphragm for interrupting the path of the X-ray beams from the emitting device to the specimen when the diaphragm is located between the specimen and the emitting device and captures the beam, and for passing the X-ray beams as far as the specimen when the diaphragm is located outside the radiation path, and a reflection device with a mirror which has a hole which permits the passage of the X-ray beam to the specimen. The reflection device is arranged such that it reflects an image of a section of the specimen to be irradiated by the X-ray beam. An observing instrument is provided which detects the image reflected by the mirror. The size of the hole provided in the mirror is selected such that said hole is large enough to pass a desired portion of the narrow X-ray beam without interference phenomena, and small enough ... Original abstract incomplete. <IMAGE>