摘要 |
PURPOSE:To prevent the increase of dark currents, and to improve reliability by mounting a semiconductor photodetector using a polyimide film as a surface protective film into a package hermetically sealed while employing a gas containing oxygen as an atmospheric gas. CONSTITUTION:A photodiode 1 placed onto a heat sink 2 is mounted to a discoid stem 4, and lead wires 3 are connected to electrodes 9 fitted through glass for sealing. The surface of the photodiode 1 is protected by using a polyimide film. A cap 6 is installed to the upper section of the stem 4, and a package hermetically sealed by fixing glass 8 for sealing to a glass plate 7 for a glass window for taking in incident beams 10 in an opening in the upper surface of the cap 6 is constituted. Dried air 5 is encapsulated into the hermetically sealed package as an atmospheric gas.
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