| 摘要 |
<p>PURPOSE:To precisely control the flow rate of fluid flowing from the inlet to outlet of a flow control valve, by opening a valve seat at the timing in synchronism with a pulse signal having variable frequencies, and by closing the valve seat at the timing of a predetermined elapse time. CONSTITUTION:A circuit is established to apply a pressure in such a direction that poppets 5a, 5b corresponding to pressure chambers 8a, 8b on the inport 2 side, open valve seats 9a, 9b at the timing in synchronism with a pulse signal having variable frequencies. Further, the circuit is also arranged to apply a pressure in such a direction that poppets 6a, 6b corresponding to pressure chambers 11a, 11b on the outport 3 side, close associated valve seats 12a, 12b. With this arrangement, the flow rate of fluid flowing from the inport 2 to the outport 3 may be precisely controlled.</p> |
