发明名称 |
A micro-displacement measuring apparatus. |
摘要 |
<p>A micro-displacement measuring apparatus using a semiconductor laser, comprises a compound resonator system (10) containing said semiconductor laser (1), and a light detector (11) capable of receiving light from said semiconductor laser, the compound resonator system being constructed in a manner such that light from said laser irradiates an object (4) to be measured and the reflected light therefrom returns to the semiconductor laser.</p> |
申请公布号 |
EP0167277(A2) |
申请公布日期 |
1986.01.08 |
申请号 |
EP19850303845 |
申请日期 |
1985.05.31 |
申请人 |
SHARP KABUSHIKI KAISHA |
发明人 |
YAMAMOTO, OSAMU;MATSUI, SADOYOSHI;TAKIGUCHI, HARUHISA;HAYASHI, HIROSHI;MIYAUCHI, NOBUYUKI |
分类号 |
G01S17/08;G01B11/00;G01D5/26;H01S5/14;(IPC1-7):G01D5/26 |
主分类号 |
G01S17/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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