| 摘要 |
PURPOSE:To execute trimming with high accuracy with less follow-up errors by one time of trimming in a short period by providing a laser, beam positioner, measuring instrument, amplifier and a control circuit for the speed of the beam positioner to a title device. CONSTITUTION:The speed, direction, length, etc. of trimming are programmed in a controller 10 and the resistance value and scanner number to be made target are programmed in a resistance measuring instrument 17. A speed command signal is thereafter outputted from the controller 10 by a trimming start command. On the other hand, resistance value changes as the trimming advances. The resistance value increases with an increase in the cutting length by the laser beam to a resistor 20 and at the same time the resistance change rate increases as well. The beam positioner 10 is moved by the adequate curve of the speed command signal to execute trimming. More specifically, the trimming is executed at the low speed of the programmed value in the part where the resistance change rate is high. The speed decreases with an increase in the change rate and therefore the trimming with high accuracy is executed in one time. |
