Semiconductor sensor, e.g. an acceleration, yaw rate or vibration sensor, has electrical insulators between a frame portion and a mobile or stationary electrode

摘要

A semiconductor sensor, having insulators (15a, b) between a frame portion (5) and a mobile electrode (12a-d, 13a-d) or a stationary electrode (16a-d, 17a-d, 22a-d, 23a-d), is new. A semiconductor sensor has a semiconductor substrate (1) with a laterally extending cavity, a frame portion (5), a beam structure (6) consisting of a mobile electrode (12a-d, 13a-d) located above the cavity and connected to the frame portion, a stationary electrode (16a-d, 17a-d, 22a-d, 23a-d) connected to the frame portion and facing the mobile electrode, and one or more insulators (15a, b) positioned between the frame portion and the mobile or stationary electrode. An Independent claim is also included for production of the above semiconductor sensor.