摘要 |
PROBLEM TO BE SOLVED: To obtain a gas sensor capable of detecting, e.g. methane, without being affected by other combustible gas components even at a high humidity. SOLUTION: In this gas sensor having substrate 3, a film oxide semiconductor 4, and a catalytic layer 5 provided so as to cover the surface thereof, the film oxide semiconductor 4 is formed as an aggregate of columnar structure particles arranged perpendicular or substantially perpendicular to the substrate surface, and a portion in the catalytic layer 5 contains at least not less than 1.3 wt.% platinum, and the surface of the film oxide semiconductor 4 is covered with a portion of the catalytic layer 5.
|