GAS CURTAIN CONTINUOUS CHEMICAL VAPOR DEPOSITION PRODUCTION OF SEMICONDUCTOR BODIES

摘要

A slim rod is produced from seed crystal and crude molten semiconductor material. It is heated in a gas mixt. contg. semiconductive material to the temp. of decompn. of the gas mixt. During transfer to the chem. vapor deposition chamber, it is exposed to the gas mixt. and kept warm enough to decomp. the gas. Gas curtains are made to keep the gas mixt from vaporizing to the wall of the chem. vapor deposition chamber. The slim rod grows as a result of the decompn. of the gas. Then, the enlarged rod is pulled out.