| 发明名称 |
Method and apparatus for supplying electricity uniformly to a workpiece |
| 摘要 |
<p>The present invention relates to a device that supplies electricity to a substrate. In one embodiment, the device includes multiple contacts (56), a current sensor, and a current regulator (250). The current sensor is attached to each of the plurality of contacts to sense their electric current. A current regulator (250) controls current applied to each of the multiple contacts (56) in response to the current sensor. In another embodiment, a compliant ridge is formed about the periphery of each contact to seal the contact from undesired chemicals. <IMAGE></p> |
| 申请公布号 |
EP1132502(A2) |
申请公布日期 |
2001.09.12 |
| 申请号 |
EP20010104461 |
申请日期 |
2001.02.28 |
| 申请人 |
APPLIED MATERIALS, INC. |
发明人 |
SHAMOUILIAN, SHAMOUIL;KUMAR, ANANDA H.;OLGADO, DONALD J.;STEVENS, JOSEPH J.;LEON, RICARDO;CLINTON, JON |
| 分类号 |
H01L21/20;C25D7/12;C25D9/02;C25D17/06;C25D17/10;C25D21/00;C25D21/12;H01L21/288;(IPC1-7):C25D21/12 |
主分类号 |
H01L21/20 |
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