LIGHT SHIELDING FILM FOR FORMING BLACK MATRIX AND SPUTTERING TARGET FOR FORMING LIGHT SHIELDING FILM

摘要

PROBLEM TO BE SOLVED: To provide a light shielding film for forming a black matrix which constitutes the color panel of a liquid crystal display or the like and a sputtering target for forming the light shielding film. SOLUTION: The light shielding film comprises a Ti-base alloy having a composition consisting of 0.3-3.0%, in total, of Ni and/or Pd and the balance Ti with inevitable impurities or further contains 2-10%, in total, of one or more selected from Mo, V and Al.