发明名称 |
Liquid replenishing apparatus. |
摘要 |
<p>A liquid replenishing apparatus (K, K') for supplying liquid raw material replenishment (8) for liquid raw material (2) of an article to at least one raw material tank (1), including a replenishment tank (7) for storing the liquid raw material replenishment (8), a first pipe (6) extending between the replenishment tank (7) and the raw material tank (1), a second pipe (10) for introducing pressurized gas into a space (9) of the replenishment tank (7), a branch pipe (6') communicating with the first and second pipes (6, 10), a pressure regulator (18) provided in the second pipe (10), and a flow regulator (17) provided in the branch pipe (6').</p> |
申请公布号 |
EP0165493(A2) |
申请公布日期 |
1985.12.27 |
申请号 |
EP19850106213 |
申请日期 |
1985.05.21 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES LIMITED |
发明人 |
TAKIMOTO, HIROAKI C/O YOKOHAMA WORKS;MIYAJIRA, TETSUO C/O YOKOHAMA WORKS;TURITA, TAMIO C/O YOKOHAMA WORKS;FUJIKAWA, MASANORI C/O YOKOHAMA WORKS |
分类号 |
G02B6/00;B01J4/00;C03B37/014;C03B37/018;C03B37/14;C23C16/448;G05D9/04;H01L21/205;(IPC1-7):G05D9/04 |
主分类号 |
G02B6/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|