| 摘要 |
PURPOSE:To obtain a soft magnetic thin film having high permeability in a high- frequency band by growing a magnetic thin film while energizing a film surface, which is forming, toward a predetermined direction in forming a soft magnetic thin film with a vapor phase thin film growing method. CONSTITUTION:An effect equivalnt to sputtering or evaporating in a magnetic field can be obtained when a film is formed while energizing in forming a thin film with sputtering or evaporating. As a magnetic field applied always meets at right angles to a direction of a current, even a magnetic path having a complicated form can be vested with uniaxial anisotropy meeting at right angles to the magnetic path without fail by forming the film while energizing a part corresponding to the magnetic path. For instance, in case of forming a film by flowing an electric grain (i) between both ends of a ring magnetic path 1, a direction ''b'' of an axis of easy magnetization meets at right angles to a direction (a) of the magnetic path 1 at each part of the magnetic path 1.
|
