| 摘要 |
PURPOSE:To improve quality, ease of production, mass productivity, etc. by sticking a metallic film in which the refractive index in the oxide state is higher than the refractive index of a glass substrate onto the glass substrate and diffusing and oxidizing the metallic film to the glass substrate thereby producing an optical waveguide. CONSTITUTION:The metallic film 12 is stuck onto the glass layer 11 of the glass substrate 10 and a resist film 13 is formed on the film 12. The films are then subjected to pattern printing, resist development, etching and resist removal so that the metallic film 12 having the prescribed shape to allow the formation of the optical waveguide remains on the glass layer 11. The stage for diffusing the film 12 to the glass substrate 10 and the stage for oxidizing the film 12 are executed in optional sequence. The glass layer 11 in the porous or opague state is vitrified to transparent glass and the optical waveguide part 14 is formed on the substrate 10. |
