摘要 |
PURPOSE:To prevent cracks, peeling, or the like of a filter layer by providing a smooth layer consisting of a transparent resin on all of the surface of a solid- state image pickup element substrate provided with a packing layer consisting of a transparent photosensitive resin and providing the filter layer for color separation on the smooth layer. CONSTITUTION:For example, a coating layer 6 of a negative transparent photosensitive resin is formed on the rugged part of a solid-state image element substrate 1. Light is irradiated to the later in recessed parts to harden it. For the purpose of hardening the layer 6 in recessed parts, the mask where light shielding films 8 are provided in positions corresponding to projecting parts provided with wiring layers consisting of Al or the like is used as an exposure mask 7. Unhardened parts are removed by a developer after this partial exposure to form packing layers consisting of a transparent photosensitive resin in recessed parts. A transparent resin layer is provided as smooth layer 9, thereby making the surface of the substrate 1 smooth approximately ideally.
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