| 摘要 |
PROBLEM TO BE SOLVED: To solve a problem that times for restrain of vibration of a machine base, regulation of a gain in a controller and the like are required since the vibration of the machine base is generated by steep driving force for moving a table. SOLUTION: A predistorter la inside an electric motor controller is provided with a simulation position controller 13 for generating a simulation speed command, a simulative adaptive speed controller 15 of which the gain is regulated adaptively by a deviation e(t), a mathematical model 17 for inputting a predistortion torque command from the adaptive speed controller 15 to output a simulation position detecting signal, and a simulation speed computing element 19 for transmitting the simulation speed detecting signal from the simulation position detecting signal. |
