AUGER ELECTRON SPECTROCHEMICAL ANALYSIS METHOD OF INSULATOR

摘要

PURPOSE:To prevent the electrification on the surface of an insulator sample and to determine exactly the surface compsn. and chemical condition of the sample by sticking conductive materials to the periphery of the analyzing point on the surface of the insulator sample then subjecting said point to an auger electron spectrochemical analysis. CONSTITUTION:The conductive materials 3 are deposited by evaporation into a pattern shape to the periphery of the analyzing point 4 on the surface of the thin insulator film 2 disposed on a substrate 1. The part between the conductive material patterns 3 and the point 4 are scanned by an electron ray to form a conductive property-changed part 5 on the extreme surface of the sample 2 and to blacken said surface, so that the parts between the patterns 3 including the point 4 are bridged by the conductive layer 5. The sample is thereafter subjected to the auger electron spectrochemical analysis, then the surface charge electrified to the analyzing point escapes through the layer 5 to the patterns and therefore the measurement is executed without electrification at all. The chemical condition is exactly determined from the surface compsn. and auger peak shape of the insulator material which was heretofore unmeasurable at all.