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发明名称
SEMICONDUCTOR DEVICE MANUFACTURE
摘要
申请公布号
GB8528340(D0)
申请公布日期
1985.12.24
申请号
GB19850028340
申请日期
1985.11.18
申请人
PLESSEY CO PLC
发明人
分类号
H01L21/265;H01L21/266;H01L21/762;(IPC1-7):H01L21/265
主分类号
H01L21/265
代理机构
代理人
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