XY TABLE IN SEMICONDUCTOR DEVICE

摘要

PROBLEM TO BE SOLVED: To attain high precision positioning by improving the structure of an XY table. SOLUTION: A movable member 8X is made not to move in the direction of Y axis for an X motor main body 6X, so that the displacement of a lower table 10X in Y axis direction caused by friction between the upper and a lower tables 10X and 10Y is prevented even the weight of the carried object is big. The magnetic action of a Y motor main body 6Y for a Y movable member 8Y remains unchanged even the position of the Y movable member in the direction of X axis is different, so that the thrust in the yaw direction of the upper table 10Y is not applied and the increase of the play or wear of the guide rail 11Y is suppressed, thus generation of the displacement or rotational vibration becomes difficult.