| 摘要 |
PROBLEM TO BE SOLVED: To provide a focus detector which is capable of performing stable focus detection without being affected by the directivity of a difference in level of a specimen surface and an optical microscope or optical inspection apparatus having the same. SOLUTION: This focus detector has a light source 4, a light shielding member 7 which shields a portion of the luminous flux from the light source 4, a beam splitting member 8 which has a surface to reflect or transmit the incident luminous flux, a beam-condensing optical system 13 which condenses the incident luminous flux and a photodetector 14 having at least two photodetecting sections A and B. The focus detector has a two-dimensional deflector 15 which deflects the luminous flux in arbitrary directions in the optical path where the first optical path arranged with the light source 4 and the light shielding member 7 and the second optical path arranged with the beam-condensing optical system 13 and a photodetector 14 intersect. The two-dimensional deflector 15 is a leaf spring actuator mirror formed with the top surface of the leaf spring actuator as a reflecting surface and is so constituted that the normal of the reflecting surface can be inclined to all directions. |
