POLISHER AND POLISHING METHOD USING POLISHER

摘要

PROBLEM TO BE SOLVED: To efficiently polish a surface of workpiece with high precision by using a polisher. SOLUTION: This polisher 4 is pressed to the rotating workpiece W, and is rotated and scanned to polish the workpiece W. A polisher which has a polishing surface 4a facing the workpiece W and formed into an approximate ring shape with a rotating axis in its center and is covered with a sheet 6 provided with fixed abrasive grains, is used.