| 摘要 |
PURPOSE:To contrive the improvement in mass production and the reduction in cost by reducing damage to sensors by a method wherein a transparent insulating protection film made of a polymer having a specific acrylic ester polymer for the main constituent s provided on an amorphous Si sensor. CONSTITUTION:The titled element has the transparent insulating protection film made of a polymer having the polymer having at least one of contitutent units shown by general formulas (1), (2), (3), and (4) as the main constituent on an amorphous Si sensor. A homopolymer, a copolymer, and a terpolymer having the constituent units of the general formulas (1)-(4) can be used in either single or bland. Besides, blend with another polymer having a homopolyer, a copolymer, and a terpolymer as the main contituent can be used. Polyvinyl alcohol and the like can be taken for the example of another polymer with which these are blended.
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