| 摘要 |
PURPOSE:To facilitate the control of a wafer and the discrimination of pellets by each mounting detecting circuits flowing currents among one or more of input terminals and a power supply line and providing a means selectively connecting the detecting circuits and each input terminal. CONSTITUTION:When detecting circuits A are fitted to n input signal terminals, 2<n> kinds of pellets can be discriminated. When n=2 is held, a VDD terminal is brought previously to input terminals M, N, and not less than 4VT voltage is applied. Consequently, the combinations of terminals, through which current flow, differ by pellets ( I, II, III or IV) as shown in the table 1. Pellets of four kinds can be discriminated by reading the combinations A O represents the flowing of current and an x no-flowing of currents in the table 1. Accordingly, since data at every level can be separated and taken not only on measurement under the state of a wafer but also on selection after assembly by introducing program steps for discriminating pellets at the beginning of a measuring program, trouble in which the control of the wafer at every level and pellets are discriminated through visual observation and separated can be omitted. |
