| 发明名称 |
APPARATUS FOR DOUBLE FLOATING WAFER TRANSPORT AND PROCESSING |
| 摘要 |
Apparatus (10) with in its tunnel passageway (12) transport and processing under double floating condition takes place of wafers (14) and whereby by means of medium flows (16) simultaneously a spinning of these wafers (14) is accomplished. |
| 申请公布号 |
WO8505757(A1) |
申请公布日期 |
1985.12.19 |
| 申请号 |
WO1985NL00021 |
申请日期 |
1985.06.03 |
| 申请人 |
BOK, EDWARD |
发明人 |
BOK, EDWARD |
| 分类号 |
B65G51/03;H01L21/67;H01L21/677;(IPC1-7):H05K13/00;B65G51/00;G03F7/16 |
主分类号 |
B65G51/03 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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