| 摘要 |
PURPOSE:To realize high transfer efficiency even at high frequency by forming structure in which a transfer electrode has a projecting section intruding to an adjacent transfer electrode. CONSTITUTION:Transfer electrodes 4, 6, 8 have sections 21 that they each overlap on adjacent transfer electrodes 5, 7, 9 in required width, and the electrodes 4, 6, 8 have triangular projecting sections 22 severally intruding into the regions of the electrodes 5, 7, etc. According to such structure, electrons in a channel in the transfer electrode such as one 5 are transferred rapidly to the transfer electrode 6, the transfer electrode 7, by an electric field directed toward the nearest region (the projecting section) in the transfer electrode 6 generated in the channel. Consequently, high transfer efficiency can be realized even at high frequency. |
