| 摘要 |
PURPOSE:To reduce an influence of a pyroelectric effect by providing a guard electrode so as to surround a modulating part, in a sensor consituted so as to modulate an intensity of a light which passes through a branch interference type optical waveguide body. CONSTITUTION:A guard electrode 60 for obstructing an invasion to a modulating part of an electric field by a pyroelectric effect is provided on a substrate so as to surround the first electrode 31 and the second electrode 32, and connected to a common potential point. This electrode 60 is formed by using, for instance, a spatter technique and a photolithography technique. In this way, even if a temperature T rises suddently, a zero point of an output voltage V0 is not varied large stepwise as conventional one, and an influence of the pyroelectric effect can be reduced.
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