| 摘要 |
PURPOSE:To obtain stable and uniform discharge by a method wherein gas introducing ports and exhausting ports are respectively provided by plural pieces at the symmetrical positions to the discharge tube axis. CONSTITUTION:The path; which starts from a blower 7 and returns to the blower 7 via gas introducing ports 51 and 52, gas chambers 10 and 9 and exhausting ports 41 and 41; and the path; which starts from the blower 7 and returns to the blower 7 via the gas introducing ports 51 and 52, the gas chamber 10 and a gas chamber 11 and exhausting ports 61 and 61; are set the fluid resistances thereof in the same one as a hydrodynamically symmetrical structure. Moreover, each piping of the paths is made in the same and the flow rate of each exhausting port and each introducing port is set in the same one. By this way, the flow of gas is stabilized without bringing a turbulent frow and a one- sided flow into existence in the gas stream in the vicinity of the discharge electrode. As a result, stable and uniform discharge can be obtained in the discharge tube 1. |
