| 摘要 |
PURPOSE:To achieve the assembly of a long quadrupole electrode by electrically connecting two or more electrode pillars having the same outside dimensions in series to each other. CONSTITUTION:Quadrupole electrode assemblies 10 and 20 at front- and rear- stage are comprised by securing front- and rear-stage electrode pillar groups 12 and 22 with insulating substrates 13, 14, 23, and 24. These two sets of quadrupole electrode assemblies 10 and 20 are coupled in series by a fixed bolt group 40 for connecting the substrates together. A single quadrupole electrode section 2 is configured by electrically connecting together the respective electrode pillars, for example, 121 and 221 that are formed in series. As a result, the substantial length of the quadrupole electrode assembly can be doubled at a time while the work and assembly accuracy are being kept in the conventional degree. |
