| 摘要 |
PURPOSE:To make it possible to measure only monochroic X-rays to be detected with high accuracy by removing a higher harmonic component, by reflecting white X-rays generated from an X-ray source by a spectral crystal and allowing the relfected X-rays to further transmit through a second spectral crystal. CONSTITUTION:As a first spectral crystal 4, a (110) Si-monocrystal with a thickness of about 400mum is used and, as a second spectral crystal 6, a Si-monocrystal, which is prepared by thinly processing the same crystal so as to reduce the thickness of only the central part to 10mum or less, is used. White X-rays 2 generated from an X-ray source 1 is passed through a slit 3 and, thereafter, incident to the first spectral crystal 4 of which the Bragg condition is adjusted so as to allow X-rays with objective energy E0 to receive surface reflection. The second spectral crystal 6, which is arranged to the route of monochroic X-rays 5 after spectral diffraction, is adjusted in its Bragg condition so as to permit X-rays with energy 3E0 to receive surface reflection. At this time, X-rays with energy integer times the energy 3E0 also receive surface reflection simultaneously. A slit 9 and an X-ray detector 10 are arranged behind the second crystal 6 so as to be positioned on the extended line of the route of monochromic X-rays 5 spectrally diffracted by the first crystal 4.
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