| 摘要 |
PURPOSE:To improve positioning accuracy, by scanning a plurality of positioning marks with spot beam of light, detecting the position of each mark and obtaining a single information of position by averaging. CONSTITUTION:Stages 4 are placed one upon another after positioning by controlling apparatus 23 and length measuring instrument 21 a mark Mx accompanying a chip 3 (CP) to be exposed to light and spot beam of light LAx are aligned. In this condition, the stage 4 is displaced in the X direction by the preset distance and relative scanning is performed on the spot beam of light LAx and lattice patterns M1, M2, M3 along their arranging directions. A position where the spot beam of light LAx is aligned in line is assumed to be P0 and a processing circuit 22 stores a wave form sampled of a photoelective signal SA issued from the position P0 up to that of termination position P4 of scanning of the stage 4 ina memory unit. Then, the processing circuit 22 calculates a single position information Py.
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