| 摘要 |
PURPOSE:To provide the captioned device made highly accurate and effective by providing a plurality of actuators independently controlled between an electrode clamping device and a main shaft and between the electrode clamping device and an electrode, and correcting an inclination of an electrode central axis with respect to a main shaft central axis in three dimensional arrangement. CONSTITUTION:A main shaft 4, a table 6, and a saddle 7 are moved so as to permit an electrode 3 to approach a reference measuring element 16 fixed on the table 6. Then, a first measuring point (a) of the electrode 3 in an XZ plane is positioned so as to make contact with the reference measuring element 16 in the X direction, and its X coordinate value is stored in a NC device 12. An X coordinate value of (b) is likewise incorporated in the NC device. In succession, Y coordinate values of points (c) and (d) in a YZ plane are incorporated to evaluate an inclination of the electrode 3 in the XZ and YZ planes and thereby to determine a voltage difference to be applied to piezoelectric element actuators 15, 15, and thus to correct the inclination of the lectrode 3 in the XZ and YZ planes. With such arrangement, accuracy and effectiveness of the captioned device can be improved. |
