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发明名称
SPUTTER COATING SOURCE WITH PLURAL TARGET RINGS
摘要
申请公布号
JPS60255974(A)
申请公布日期
1985.12.17
申请号
JP19850104167
申请日期
1985.05.17
申请人
VARIAN ASSOC
发明人
DONARURUDO AARU BOOIZU
分类号
C23C14/36;C23C14/35;H01J37/34
主分类号
C23C14/36
代理机构
代理人
主权项
地址
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