发明名称 |
Quantitative compositional analyser for use with scanning electron microscopes |
摘要 |
An analysis system for a scanning electron microscope having a backscattered electron detector. The output of the detector is amplified, processed by an analogue to digital converter, multi-channel analyser, and digital conversion and processing circuit to generate a signal indicative of the atomic number factor of the specimen. Calculation of stoichiometric valence combinations of non-elemental specimens is also disclosed. A calibration device is also disclosed.
|
申请公布号 |
US4559450(A) |
申请公布日期 |
1985.12.17 |
申请号 |
US19830519056 |
申请日期 |
1983.08.01 |
申请人 |
UNISEARCH LIMITED |
发明人 |
ROBINSON, VIVIAN N. E.;CUTMORE, NICHOLAS G. |
分类号 |
H01J37/22;G01N23/203;G01N23/225;H01J37/256;H01J37/28;(IPC1-7):G01N23/225 |
主分类号 |
H01J37/22 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|