| 摘要 |
A process to form an all glass capillary or micro-fluidic channel that is electrically insulated from the environment is described. Said process has two stages. The first stage comprises forming a micro-channel in the surface in a substrate of a glassy material. The substrate is bonded to a layer of oxide that lies on the surface of a silicon substrate or wafer, thereby sealing the capillary. After all silicon has been selectively removed, a cover consisting of a thin oxide membrane remains over the capillary. Using a low temperature bonding, a second sheet of glassy material, or glass plate, is then bonded to this membrane to structurally reinforce it.
|
