发明名称 DISTINGUISHING METHOD OF CONNECTING RELATION IN CIRCUIT
摘要 PURPOSE:To distinguish the connecting relation in a circuit by only one scanning, by obtaining a difference between numbers of two line segments which constitute one pattern and have respective numbers within a selected slit. CONSTITUTION:Two line segments which constitute one pattern and respective numbers within a selected slit, are processed. A difference between respective numbers of two line segments which are extracted in a first slit which adjoins a second slit at the side opposite to the slit scanning direction, is obtained. For example, if the difference X of numbers is equal to 1, then the pattern in the right and left slits SL, SR is judged to be continual.
申请公布号 JPS60254618(A) 申请公布日期 1985.12.16
申请号 JP19840109424 申请日期 1984.05.31
申请人 FUJITSU KK 发明人 OOE RIYOUICHI;NAKAYAMA NORIAKI;MACHIDA YASUHIDE;NAGATA TAKEO
分类号 G01N21/88;G01N21/956;G06F17/50;H01J37/30;H01L21/027;H01L21/66 主分类号 G01N21/88
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