| 摘要 |
PURPOSE:To produce a master disk for duplication with a simple stage by coating the prescribed rugged pattern consisting of an inorg. material on a substrate with a thin film consisting of chromium, nickel or the oxide thereof. CONSTITUTION:The master disk can be produced simply by forming the rugged pattern consisting of the inorg. material on the substrate by a pattern forming method using the inorg. material then depositing the thin film consisting of chromium, nickel or the oxide thereof on the surface. The process for production is therefore simplified and the stage for transferring the rugged pattern is omitted. The disk formed by coating the rugged pattern of the inorg. material with the thin film consisting of chromium, nickel or the oxide thereof is usable as the master disk in a photpolymn. method. The master disk is coated with the thin film consisting of chromium, nikel or the oxide thereof in order to increase the mechanical strength and chemical resistance of the rugged pattern. The chromium oxide film or the surface-oxidized chromium film is more preferable in terms of a releasing property. |
