| 摘要 |
PURPOSE:To compensate automatically error in bonding position, by sensing a displacement quantity of a bonding arm by a sensor, by making an operation of a feed-control signal required to correct the error in the bonding position by a correcting circuit, and by outputting this signal. CONSTITUTION:The expanded displacement quantity of a bonding arm 5 is sensed by a sensor 6 which is mounted on one side at the tip of the bonding arm 5. The output of the sensor is converted to an electrical signal by a transducer 9. According to the output of a comparative and operational circuit 10 which compares the output of the transducer 9 with an absolute value being stored previously, a correcting signal required to correct the error is outputted to the feed mechanism 1 by the correction instructing circuit 11. |
