摘要 |
PURPOSE:To obtain the composite membrane having high permselectively appropriate for efficiently concentrating oxygen from air by using an organic compd. contg. fluorine and silicon as a monomer, and polymerizing the monomer with low-temp. plasma generated by glow discharge. CONSTITUTION:Either a single organic compd. contg. a fluorine and a silicon atom or a mixture of a compd. contg. fluorine and a compd. contg. silicon may be used as the organic compd. contg. fluorine and silicon. The compds. are required to have <=200 deg.Cb.p. under atmospheric pressure. A material having somewhat inferior oxyen permeability however having high strength is used for obtaining a porous body. A plasma-polymerized thin film having <=1mu thickness is laminated directly on said porous body or on the porous body whose pores are filled with silicon rubber, etc. The atomic ratio of fluorine to silicon is preferably regulated to 1:2-6:1. |