发明名称 MANUFACTURE OF INFRARED DETECTOR
摘要 PURPOSE:To prevent Hg from being decomposed and discharged and prevent deterioration of an infrared-ray detectng element made of HgGdTe by charging and heating gaseous H2 in a vacuum container which contains the detecting element and then discharging the gaseous H2 gas, returning the internal temperature to the ordinary temperatures, and further evacuating the container at high temperatures for a short time. CONSTITUTION:The infrared-ray detector is equipped with the infrared-ray detecting element 3 made of HgGdTe fitted to a heat sink 4 in the vacuum container 1 and detects and transduces infrared rays incident through an infraredray transmission window 2 into an electric signal, and the H2 adsorbing ability of a hydrogen getter 6 is large, so this is utilized to fill the container 1 with lowpressure gaseous H2 as a substitute for a high vacuum and perform a baking treatment. Thus, water, O2, N2, etc., other than H2 which stick on the internal wall of the container 1 are substituted with the H2, and the container is evacuated. Then, the internal pressure is returned to the atmospheric pressure to discharge the gaseous H2 and separate H2 sticking on the internal surface, and the container is evacuated at high temperatures for a short time. The remaining gaseous H2 is adsorbed to the getter 6 to prevent deterioration in vacuum degree. Thus, Hg is decomposed and discharged in a low-pressure,high-vacuum atmosphere to prevent the element 3 from deteriorating.
申请公布号 JPS60253926(A) 申请公布日期 1985.12.14
申请号 JP19840111440 申请日期 1984.05.31
申请人 FUJITSU KK 发明人 HAMASHIMA SHIGEKI;TAKIGAWA HIROSHI;KAWAI TETSUYA
分类号 G01J1/02;H01L31/02;H01L31/0296 主分类号 G01J1/02
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