| 摘要 |
PURPOSE:To enable to simplify the inspection of wire disconnection of storage wire without using a special measuring device by a method wherein the stage wire to be used for inspection is added in parallel to a stage wire. CONSTITUTION:The disconnection of wire on a stage wire 6 is inspected by applying voltage, a current or a signal to a stage wire directly from a wafer measuring device 2 or through a probe card 3 and then through the stage wire 7 to be used for inspection and a chuck top 4, and also by checking whether or not normal voltage, current or signal is obtained using a wafer measuring device 2 which is connected to the stage wire 6. Besides, in the above-mentioned case, voltage, a current or a signal is applied to the stage wire 6 through the stage wire 7 to be used for inspection and whether their values are normal is judged by the wafer measuing device 2, but the above-mentioned inspection can also be performed by applying voltage, a current or a signal to the stage wire 6 from the wafer measuring device 2 and their values are judged through the stage wire 7 to be used for inspection.
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