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发明名称
摘要
申请公布号
DE2926785(C2)
申请公布日期
1985.12.12
申请号
DE19792926785
申请日期
1979.07.03
申请人
HIGRATHERM ELECTRIC GMBH, 7100 HEILBRONN, DE
发明人
DAHLBERG, REINHARD, DR.RER.NAT., 7101 FLEIN, DE
分类号
H01L29/73;H01L21/18;H01L21/322;H01L21/331;H01L29/06;H01L29/10;H01L29/41;H01L29/423;H01L29/732
主分类号
H01L29/73
代理机构
代理人
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