High flow GaCI3 delivery

摘要

Vapor phase gallium trichloride is fed to a gallium nitride reactor (52) by injecting a heated (40) carrier gas (10) at an elevated pressure and at least 80°Cinto a container (26) having a supply of melted (40) gallium trichloride (28) to entrain the gallium trichloride, and delivering the carrier gas and entrained gallium trichloride to the reactor through a delivery line (44) at a temperature of at least 80°C. An apparatus for conducting the process is also described.