发明名称 TURBO MOLECULAR PUMP
摘要 PURPOSE:To eliminate a spring and to save adjusting by providing mechanism for applying pre-pressure between the bottom wall of housing and a bearing while applying proper axial pre-pressure of atmosphere in an atmospheric chamber onto the bearing through a bearing stopper member having a pressure receiving face. CONSTITUTION:Mechanism 13 for applying proper axial pre-pressure of atmosphere in an atmospheric chamber 15 through a bearing stopper member 14 onto the bearings 7, 8 is provided between the bottom wall 1a' of housing and the bearing 8. Atmospheric air is fed continuously through a hole 18 into said chamber 15. Upon high speed rotation of rotor drive shaft 5 through a motor 9, the rotor blade 6a will rotate integrally with high speed thus to evacuate the vacuum chamber 2. Consequently, the differential pressure produced between the vacuum chamber 2 and the atmospheric chamber 15 will cause application of proper axial pre-pressure onto the bearings 7, 8 through a shaft stopper member 14 having a pressure receiving face 16. As a result, spring load regulation is not required to save manpower required for adjusting while the spring is not required to reduce the number of parts and the price.
申请公布号 JPS60252194(A) 申请公布日期 1985.12.12
申请号 JP19840109292 申请日期 1984.05.28
申请人 SHIMAZU SEISAKUSHO KK 发明人 NISHIKAWA HIDETO
分类号 F04D19/04 主分类号 F04D19/04
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