Substrate holding device including adhesive face with hexagons defined by convex portions

摘要

In a method of the present invention for holding a substrate in a vacuum, a glass substrate ( 5 ) is held by an adhesive pad ( 20 ) or an adhesive sheet, both of which are made from a material containing a diene based resin, whereby an adhesive agent is prevented from remaining on the substrate, and the adhesive sheet can be detached with ease from the substrate after assembling the substrates.