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发明名称
摘要
申请公布号
JPS60502179(A)
申请公布日期
1985.12.12
申请号
JP19840503436
申请日期
1984.09.06
申请人
发明人
分类号
H01L21/3205;H01L21/28;H01L21/31;H01L21/44;H01L21/768
主分类号
H01L21/3205
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代理人
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