发明名称 SEPARATING METHOD OF PROTECTING FILM
摘要 PURPOSE:To separate a protecting film without mechanical influence to a thin plate article by providing time difference from the start of the returning operation of adhesive tape separating means to the start of winding the film with the adhesive tape. CONSTITUTION:When an article 2 press-bonded at an adhesive tape 14 on a protecting film 4, fed by a belt 6 to between rollers 15 is fed onto a base 16, winding shafts 11, 12 and the rollrs 15 are temporarily stopped. The base 16 attracts the article 2 to start returning operation at an attracting base 19. Since the shafts 11, 12 are stopped, the tape 14 is slackened between the rollers 15 and 17. The shaft 12 winds the film 4 slightly in delay from the returning start, and the shaft 11 holds stopping. Accordingly, the film 4 is separated by the separating force of the tape 14 while slackened, and no stress is applied to the article 2. When the film 4 is almost separated from the article 2, the attraction of the shaft 11 and the base 16 is released, and when the base 19 moves while winding the tape 14, the article 2 moves together with the film 4 by the adhesive strength of the tape 14, the article is placed on a belt 22, the film 4 is completely separated, and wound on the shaft 12 together with the tape.
申请公布号 JPS60250642(A) 申请公布日期 1985.12.11
申请号 JP19840107191 申请日期 1984.05.25
申请人 NITTO DENKI KOGYO KK 发明人 AMETANI MINORU
分类号 H01L21/02;H01L21/67;H01L21/68;H01L21/683 主分类号 H01L21/02
代理机构 代理人
主权项
地址